A robot apparatus for executing a set of service procedures on a plasma
processing system including a docking port is disclosed. The apparatus
includes a platform and a docking probe coupled to the platform, wherein
the docking probe is configured to dock with the docking port. The
apparatus also includes a robot arm coupled to the platform, and further
configured to substantially perform the set of service procedures, and a
tool coupled to the robot arm. The apparatus further includes a computer
coupled to the platform, wherein the computer is further configured to
execute the set of service procedures, and wherein when the docking probe
is docked to the docking port, the set of service procedures is performed
by the tool.