A micro electro-mechanical system (MEMS) positioner, including an actuator
and method for making the same, includes a stage formed within a first
layer of semiconductor material, along with a series of beams, flexure
hinges and controlled input thermal actuators. The actuators are
operatively engaged with a second layer, and are selectively actuatable
to effect longitudinal expansion thereof, so that relative actuation
between individual ones of actuators spaced in the planar direction
relative to one another is configured to generate controlled movement of
the stage within the planar direction, and relative actuation between
individual ones of actuators spaced orthogonally to the planar direction
relative to one another is configured to generate controlled movement of
the stage out of the planar direction. The relative position between the
stage and the support is adjustable in each of six degrees of freedom, so
that the compliant mechanism forms a quasi-static precision manipulator.