An automated metrology recipe set up process is described for a
manufacturing process, in which patterns to be formed on a device are
defined using a design database. The design database is processed to
produce a simulated image of a feature for use in a metrology tool for a
measurement of the feature. The simulated image is supplied to the
metrology tool, where it is used as a basis for alignment of the tool for
the measurement. Other recipe data is combined with the simulated image
to provide a fully automated metrology set up process.