An RF device includes a support structure coupled to an RF electrode that
has conductive and dielectric portions. A cooling member is coupled to
the support structure and is configured to cool a back surface of the RF
electrode. The cooling member is distanced from the back surface of the
RF electrode. A memory is coupled to the RF electrode. The memory is
configured to store information to facilitate operation of at least one
of the RF electrode, the cooling member and an RF energy source.