A method of wet coating for applying an anti-reflective film to a
substrate comprises the following steps: (1) providing and cleaning a
substrate; (2) preparing a coating solution comprised of a highly
volatile solvent and a film-forming compound dissolved in the highly
volatile solvent; (3) coating the substrate homogeneously with the above
coating solution at normal temperature and confirming complete
evaporation of the liquid on the substrate at normal temperature to
finish a single layer coating without thermal treatment; and (4)
repeating the above coating step as required to obtain a desired number
of layers.