A miniature deformable mirror includes an upper portion, a lower portion,
and a spacer. The upper portion includes a frame, an organic thin film,
and a reflecting layer. The organic thin film is used as a deformed
element and is supported by the frame. The reflecting layer is disposed
on the organic thin film used for reflecting incident light. The lower
portion includes a conductive substrate. The conductive layer is disposed
on the substrate and is used for conducting the driving voltage. The
spacer is sandwiched between the upper portion and the lower portion.
While voltages are applied, electrostatic forces are generated to deform
the organic thin film and reflecting layer. Therefore, a miniature
deformable mirror with continuously variable focuses is realized.