A method of forming a pattern of elements is shown. In one embodiment, the method
is used to create a reticle. In another embodiment, the method is used to further
form a number of elements on a surface of a semiconductor wafer. Identified problem
structures or regions in a pattern of elements are moved from lower level cells
of a hierarchy structure into higher level cells before edge movement takes place.
Because all cells have been selectively leveled first, substantially all external
influences to cells have been removed for each cell before edge movement takes
place. The methods and procedures described herein therefore reduce the possibility
of undesirable modifications such as electrical shorts. The methods and procedures
described herein also reduce overall processing time.