An illumination device comprises a housing, a light source, a light transmissive support plate and a sensor. The light source is mounted within a cavity of the housing. The light transmissive support plate is engaged with the housing. The housing and the light source are configured for enabling light from the light source to impinge upon the light transmissive support plate. The sensor is configured for selectively activating the light source dependent upon placement of an article relative to the light transmissive support plate. In one embodiment, the sensor is preferably a force sensitive sensor having the light transmissive support plate engaged therewith. The light transmissive support plate is mounted in a manner enabling force to be applied on the force sensitive sensor by the light transmissive support plate when a corresponding force is applied on a support surface of the light transmissive support plate.

 
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> Method and apparatus to process substrates with megasonic energy

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