An apparatus for chemical mechanical planarization (100). The apparatus has
a platen assembly for holding an object (e.g., wafer, disk, flat panel,
glass) to be planarized. The apparatus (100) also has a polishing head
coupled to a polishing pad, which has a smaller diameter than the object.
The polishing head is movable (e.g., pivotable, rotatable, translational)
from a first region overlying the platen assembly to a second region,
which is outside the first region. A removable substrate is coupled
between the polishing pad and the polishing head. The removable substrate
is removably coupled to a coupling on the polishing head. The apparatus
also has a first magazine (511) disposed in the second region, where the
first magazine houses at least one substrate comprises a first polishing
pad to be placed on the coupling on the polishing head. A second magazine
(513) housing at least one substrate comprising a second polishing pad may
be provided in the second region. A disposal site (502) may also be
provided in the second region for receiving a used substrate or a faulty
substrate.