A semiconductor device such as a P-N or P-I-N junction diode, includes a
first semiconductor layer having a first conductivity-type and being
mounted over a metal address line, and a second semiconductor layer having
a second conductivity-type and being mounted over the first semiconductor
material. The diode preferably has a thickness of substantially no more
than about 1 micron, and the diode includes a P-N junction confined to a
thickness of less than about 0.1 micron. In the preferred embodiment the
method comprises depositing a first semiconductor layer having a first
conductivity type, depositing a second intrinsic layer, annealing to
convert both layers to a polycrystalline layer, implanting ions of a
second conductivity type into the second layer, and annealing to convert
the second layer to a polycrystalline. The result is a diode having an
ultra-sharp p-n junction.