The present invention relates to organic anti-reflective coating polymers
and preparation methods therefor. Anti-reflective coatings are used in a
semiconductor device during photolithography processes to prevent the
reflection of light from lower layers of the device, or resulting from
changes in the thickness of the photoresist layer, and to eliminate the
standing wave effect when ArF light is used. The present invention also
relates to anti-reflective compositions and coatings containing these
organic anti-reflective coating polymers, alone or in combination with
certain light-absorbing compounds, and preparation methods therefor. When
the polymers of the present invention are used in an anti-reflective
coating in a photolithography process for forming submicro-patterns, the
resultant elimination of changes in CD due to diffractive and reflective
lights originating from lower layers increases the product yield in the
formation of submicro-patterns during the manufacture of 64 M, 256 M, 1G,
4G and 16G DRAM semiconductor devices.