A fine drive unit comprises a suspension arm having a head portion and a support member supporting the suspension arm for undergoing pivotal movement. The support member has a coupling portion connected to the suspension arm, a spring portion connected to the coupling portion, at least one pair of bi-directional cantilevers, and piezoelectric members each disposed on a respective one of the cantilevers. When a voltage having a preselected frequency is applied to the piezoelectric members, the cantilevers are vibrated to cause the cantilevers to contact the suspension arm and thereby finely drive the head portion.

 
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> Reconfigurable and scalable intergrated optic waveguide add/drop multiplexing element using micro-opto-electro-mechanical systems and methods of fabricating thereof

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~ 00030