The parallel detecting spectroscopic ellipsometer/polarimeter sensor has no
moving parts and operates in real-time for in-situ monitoring of the thin
film surface properties of a sample within a processing chamber. It
includes a multi-spectral source of radiation for producing a collimated
beam of radiation directed towards the surface of the sample through a
polarizer. The thus polarized collimated beam of radiation impacts and is
reflected from the surface of the sample, thereby changing its
polarization state due to the intrinsic material properties of the sample.
The light reflected from the sample is separated into four separate
polarized filtered beams, each having individual spectral intensities.
Data about said four individual spectral intensities is collected within
the processing chamber, and is transmitted into one or more spectrometers.
The data of all four individual spectral intensities is then analyzed
using transformation algorithms, in real-time.