A number of micromachined optomechanical switching cells and matrix
switches including such switching cells are disclosed herein. One
optomechanical switching cell of the present invention includes a parallel
plate actuator positioned on a substrate. A mirror coupled to the actuator
is disposed to selectively redirect an incident optical beam. The present
invention also contemplates an optomechanical matrix switch including a
substrate and a plurality of optomechanical switching cells coupled
thereto. The matrix switch further includes an arrangement for monitoring
the optical power incident upon, and output by, the matrix switch.