The invention is a method for positioning a conveying mechanism having a
holding portion for semiconductor wafers. Respective provisional position
coordinates of an orienting teaching standard position and a container
teaching standard positions are inputted into a controlling unit in
advance. A wafer to be conveyed precisely positioned with respect to and
held by the holding portion is conveyed and placed on the rotating
orienting device according a control based on the provisional coordinates
of the orienting teaching standard position. A posture detector then
detects the eccentric volume and eccentric direction of the wafer.
Appropriate position coordinates are made by amending the provisional
coordinates. Then, a wafer to be conveyed precisely positioned with
respect to the container teaching standard position is conveyed and placed
on the rotating orienting device according a control based on the
provisional coordinates of the orienting teaching standard position. A
posture detector then detects the eccentric volume and eccentric direction
of the wafer. Appropriate position coordinates are made by amending the
provisional coordinates.