A method and apparatus for high density nanostructures is provided. The
method and apparatus include Nano-compact optical disks, such as
nano-compact disks (Nano-CDS). In one embodiment a 400 Gbit/in.sup.2
topographical bit density nano-CD with nearly three orders of magnitude
higher than commercial CDS has been fabricated using nanoimprint
lithography. The reading and wearing of such Nano-CDS have been studied
using scanning proximal probe methods. Using a tapping mode, a Nano-CD was
read 1000 times without any detectable degradation of the disk or the
silicon probe tip. In accelerated wear tests with a contact mode, the
damage threshold was found to be 19 .mu.N. This indicates that in a
tapping mode, both the Nano-CD and silicon probe tip should have a
lifetime that is at least four orders of magnitude longer than that at the
damage threshold.