A method for localizing and isolating an errant process includes the steps
of retrieving from a defect image database a selection of images each
image having image content similar to image content extracted from a query
image depicting a defect, each image in the selection having corresponding
defect characterization data. A conditional probability distribution of
the defect having occurred in a particular process step is derived from
the defect characterization data. A process step as a highest probable
source of the defect according to the derived conditional probability
distribution is then identified. A method for process step defect
identification includes the steps of characterizing anomalies in a
product, the anomalies detected by an imaging system. A query image of a
product defect is then acquired. A particular characterized anomaly is
then correlated with the query image. An errant process step is then
associated with the correlated image.