Laser Programming of Integrated Circuits. The invention relates to the
laser adjustment or laser programming of laser fuses of an integrated
circuit on a chip, with laser light, the integrated circuit having a
plurality of laser fuses and being connected to a plurality of contact
pads on the chip, and the chip being covered with a polymer layer which
has at least windows on the plurality of contact pads, and comprising at
least one wiring interconnect on the polymer layer which is electrically
connected to at least one of the plurality of contact pads and ends at a
predetermined location on a surface of the chip. To make it possible for
integrated circuits to be programmed with laser light as late as possible
in the production process, according to the invention the chip is
irradiated in a predetermined region with intensive laser light, so that
in the wiring interconnect there is created an interconnect opening, in
the polymer layer lying thereunder there is created a layer opening and at
least one of the plurality of laser fuses is interrupted in the
predetermined region.