A method for conducting an ALD process to deposit layers on a substrate which includes an electrostatic chuck (ESC) to retain the substrate. Electrode(s) in the chuck assembly are used to induce a voltage on the substrate to promote precursor adsorption on the substrate.

Un método para conducir un proceso de ALD para depositar capas en un substrato que incluye una tirada electrostática (salida) para conservar el substrato. Electrode(s) en el montaje de la tirada se utiliza para inducir a un voltaje en el substrato que promueva la adsorción del precursor en el substrato.
 
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