At a face of a silicon semiconductor substrate tilted about one degree from
a [100] orientation, a readout integrated circuit (ROIC) is implemented,
specially designed and fabricated for direct epitaxial growth. Layers of
II-VI semiconductor material, preferably including layers of HgCdTe of
different bandgaps, are successively and monolithically grown on the face
by molecular beam epitaxy (MBE) within a window masking the face and then
patterned and wet-etched to create mesas of two-color detector elements in
an array. Preferably a beginning buffer layer of CdTe is grown to minimize
crystalline mismatch between the Si and the HgCdTe. Sloped sidewalls of
the mesas ensure good step coverage of the conductive interconnects from
the detector elements to the ROIC.