A dynamic optical spectral filter is implemented in a
microelectromechanical system (MEMS). It comprises a frame. An array of
mirrors is provided on a first portion of the frame, along with a second
array of adjustment mirrors on a second portion of the frame. An array of
variable beam splitters is provided on a middle portion of the frame,
between the first array and the second array. Finally, to provide the
filter functionality, optical delays are disposed in beam paths between
the first mirror array the second mirror array. These elements are used to
produce multiple Mach-Zehnder interferometers, such as cascaded or series
interferometers. Implementations have advantages associated with speed of
operation and can have polarization isotropy.
