A probe scanning device has a first tubular member extending in a z
direction. A second tubular member has a rear end portion extending into
the first tubular member to define a space between an inner peripheral
surface portion of the first tubular member and an outer peripheral
surface portion of the second tubular member. A probe tip is mounted on a
front end portion of the second tubular member. A viscous material is
disposed in the space between the first tubular member and the second
tubular member. A moving mechanism reciprocally moves the first tubular
member in an xy direction, and a voice coil motor drives the second
tubular member towards the first tubular member in the z direction. A
drive mechanism has a coarse adjustment mode for coarsely moving the probe
tip toward a surface of a sample and a measurement mode for fine movement
of the probe tip in the z direction to maintain a given relationship
between relative positions of the probe tip and the sample surface after
coarse movement. A connecting mechanism selectively integrally connects
the first tubular member and the second tubular member to one another.
