Technique for measuring small distances between, and for measuring the flatness of, electrically conductive surfaces

   
   

A method and apparatus for measuring the distance between first and second proximately disposed electrically conductive surfaces is provided in which the force exerted between the first and second surfaces is measured to obtain an exerted force value. A separation distance between the first and second surfaces is determined as a function of the exerted force value.

Se proporciona un método y aparato para medir la distancia en medio primero y en segundo lugar próximamente eléctricamente dispuestas las superficies conductoras en las cuales la fuerza ejerció entre las primeras y las segundas superficies se mide para obtener un valor ejercido de la fuerza. Una distancia de la separación entre las primeras y segundas superficies se determina en función del valor ejercido de la fuerza.

 
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