Optical waveguide with spot size changing core structure and method for manufacturing the same

   
   

In a method for manufacturing an optical waveguide, a core layer is formed on a clad layer, and a stepped portion in formed in the core layer. Then, a planar layer is formed on the core layer so that the planar layer completely covers the stepped portion of the core layer. Finally, the planar layer and the core layer are etched, so that the planar layer is completely removed and the core layer is converted into a tapered core layer.

 
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