A process for producing a purified aqueous hydrogen peroxide solution,
comprising passing a charged aqueous hydrogen peroxide solution containing
impurities through a purifier tower packed with an ion exchange resin, a
chelate resin or an adsorption resin to thereby purify the charged aqueous
hydrogen peroxide solution, wherein there are provided a feed pump of
given output capable of causing the charged aqueous hydrogen peroxide
solution to flow to the purifier tower and further a flow sensor capable
of sensing a flow rate of charged aqueous hydrogen peroxide solution being
fed to the purifier tower and wherein the output of the feed pump is
controlled in cooperation with the flow sensor so as to bring the charged
aqueous hydrogen peroxide solution into contact with the ion exchange
resin, chelate resin or adsorption resin while maintaining the flow of
charged aqueous hydrogen peroxide solution at a constant rate. In this
process, not only can remaining of bubbles in the purifier tower be
avoided but also pressure and temperature increases can be prevented in
the purification operation, so that the aqueous hydrogen peroxide solution
can be brought into contact with the ion exchange resin, etc. safely and
efficiently.