Flexure with integral electrostatic actuator

   
   

A flexure for a micro-electro-mechanical device includes a longitudinal beam. An actuator integral to the beam acts to flex the beam when activated.

Um flexure para um dispositivo micro-eletro-mecânico inclui um feixe longitudinal. Uma integral do atuador ao feixe age para flexionar o feixe quando ativado.

 
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