Method for drying a microstructure member having many micro concavities in
a surface, the micro concavities containing water, includes adjusting the
temperature of liquid inside the micro concavities to a temperature in the
range of the cloud point of a surfactant .+-.1.degree. C., and supplying a
mixture of the surfactant and a hydrophobic solvent adjusted to a
temperature in the range of the cloud point .+-.1.degree. C. into the
micro concavities to remove part or all of the water; heating the liquid
inside the micro concavities to a temperature exceeding the cloud point
+1.degree. C., and supplying the hydrophobic solvent controlled to a
temperature exceeding the cloud point +1.degree. C. into the micro
concavities to replace the liquid in the concavities with the hydrophobic
solvent; and placing the resulting microstructure member with the
concavities into contact with liquid or supercritical carbon dioxide to
replace the hydrophobic solvent with the liquid or supercritical carbon
dioxide.
O método para secar um membro do microstructure que tem muitos micro concavities em uma superfície, os micro concavities que contêm a água, inclui o ajuste da temperatura do líquido dentro dos micro concavities a uma temperatura na escala do ponto de nuvem de um +-.1.degree do surfactant. O C., e fornecer uma mistura do surfactant e de um solvente hydrophobic ajustaram a uma temperatura na escala do +-.1.degree do ponto de nuvem. C. nos micro concavities para remover a parte ou a toda a água; aquecendo o líquido dentro dos micro concavities a uma temperatura que excede o ponto de nuvem +1.degree. C., e fornecer o solvente hydrophobic controlado a uma temperatura que excede o ponto de nuvem +1.degree. C. nos micro concavities para substituir o líquido nos concavities com o solvente hydrophobic; e colocando o membro resultante do microstructure com os concavities no contato com dióxido de carbono líquido ou supercritical para substituir o solvente hydrophobic com o líquido ou o dióxido de carbono supercritical.
