Micromachined component and method of manufacture

   
   

A method of manufacturing a micromachined component includes using a first liquid to etch a first layer (140) located underneath a second layer (150), exposing the second layer to a second liquid that is inorganic and miscible in carbon dioxide, and supercritical drying the micromachined component with carbon dioxide.

Un metodo di produzione della a micromachined il componente include usando un primo liquido per incidere un primo strato all'acquaforte (140) situato sotto un secondo strato (150), esponente il secondo strato ad un secondo liquido che รจ inorganico e miscibile in anidride carbonica e l'essiccamento ipercritico micromachined il componente con l'anidride carbonica.

 
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