The present invention provides an oxidation sensor for an electrical
circuit or MEMS device that includes a conductor located on an insulating
substrate and a sensor trace located on the insulating substrate adjacent
the conductor. The sensor trace is located on the insulating substrate
adjacent the conductor and is configured to oxidize at a rate greater than
an electrical component associated with the sensor trace on the electrical
circuit or MEMS device when the sensor trace and the electrical component
are exposed to a same oxidizing environment. By oxidizing and thus
becoming an open circuit more rapidly than any structure on a electrical
circuit or MEMS device at a given relative humidity (i.e. in the same
package), the oxidation sensor is designed to provide early warning of
oxidation. Thus, the present invention serves as a sensor that will give
advance warning of a leaky package and associated oxidation.
