A read/write head microactuator includes first and second insulating
deposits that are flat, spaced apart by an air gap, and laterally movable
responsive to a microactuator electrical drive current. First and second
flat, interdigitated drive electrode deposits are deposited on the first
insulating deposit. A flat, digitated sense electrode deposit is deposited
on the second insulating deposit. The sense electrode deposit provides a
relative position output. The sense electrode deposit faces both the drive
electrode deposits across the air gap.
