A thin-film resonator having a seed layer and a method of making the same
are disclosed. The resonator is fabricated having a seed layer to assist
in the fabrication of high quality piezoelectric layer for the resoantor.
The resonator has the seed layer, a bottom electrode, piezoelectric layer,
and a top electrode. The seed layer is often the same material as the
piezoelectric layer such as Aluminum Nitride (AlN).
