There is provided an array of fluoro-substituted silsesquioxane thin film
precursors having a structure wherein fluoro groups are bonded to the
silicon atoms of a silsesquioxane cage. In a first aspect, the present
invention provides a composition comprising a vaporized material having
the formula [F--SiO.sub.1.5 ].sub.x [H--SiO.sub.1.5 ].sub.y, wherein
x+y=n, n is an integer between 2 and 30, x is an integer between 1 and n
and y is a whole number between 0 and n. Also provided are films made from
these precursors and objects comprising these films.
