The present invention is directed to a precious metal sputtering target
having a columnar crystallographic microstructure such that crystals are
grown in a direction normal to the sputtering surface in order to solve
conventional problems. The high-purity sputtering target of the present
invention prevents chipping of a minute cluster mass that occurs in a
sputtering target produced through casting or powder metallurgy; produces
thin film of excellent quality; and has considerably reduced internal
defects.
