An apparatus determines the thickness and composition of a multi-layered sample
comprised of at least a copper layer and a tin-copper alloy plating layer disposed
on the copper layer. The sample is irradiated with primary X-rays and an energy-dispersive
X-ray detector detects fluorescent X-rays and diffracted X-rays emitted from the
sample. An X-ray spectrum of the detected fluorescent X-rays and diffracted X-rays
is generated. The concentration of copper in the tin-copper alloy plating layer
of the sample is determined utilizing peak intensities of the diffracted X-rays
in the X-ray spectrum. The thickness of the tin-copper alloy plating layer of the
sample is determined utilizing peak intensities of the fluorescent X-rays in the
X-ray spectrum and the determined copper concentration.
