A fluorescent X-ray analysis apparatus includes: an X-ray generation source for
radiating a beam of primary X-rays; spectroscopic elements circularly arranged
so that their inner surfaces describe a circle centered on an optical axis of the
beam of primary X-rays for monochromatizing the beam of primary X-rays and condensing
the beam on a surface of an irradiation object; a spectroscopic element position
adjuster for adjusting the positions of the spectroscopic elements; secondary X-rays
detector for detecting secondary X-rays radiated from the surface of the irradiation
object irradiated with the monochromatized beam of primary X-rays; a secondary
X-ray detector position adjuster adjusting the position of the secondary X-ray
detector; an irradiation object surface position detector detecting the position
of the surface of the irradiation object; and a controller adjusting the positions
of the spectroscopic elements through the spectroscopic element position adjuster
to condense the monochromatized beam of primary X-rays on the surface of the irradiation
object, on the basis of the position of the surface of the irradiation object detected
by the irradiation object surface position detector.
