Disclosed is a semiconductor radio frequency (RF) device having a shielding
structure for minimizing coupling between RF passive components and conductive
routing for active components. In one example, the device includes at least one
shielding layer formed between the RF passive components and conductive routing.
The shielding layer includes at least one opening. In another example, a second
shielding layer may be used. The second shielding layer may also have an opening,
and the openings in the first and second shielding layers may be offset from one
another. The first and second shielding layers may be connected to each other through
a guard ring, and may also be connected to a common voltage potential.
