An automatic tester for an analog micromirror device includes a computer having
an ADC and DAC connected to its peripheral bus. A micromirror device under test
is mounted on a black box containing a light source such as a laser and a position
sensitive device. The light beam is reflected by the micromirror device onto the
position sensitive device so that the deflection of the mirror in two axes can
be measured. The output of the position sensitive device is amplified and coupled
to the ADC via a tester board. The computer can test the micromirror device to
detect mechanical failure and to measure the resonant frequency and Q of the driving
coils, and SNR of the internal package feedback which measures the position of
the mirror.
