The present invention relates to a transfer chamber for a flat display
device manufacturing apparatus, and more particularly, to a transfer
chamber for a flat display device manufacturing apparatus, having a
combination of functions of transfer and load-lock chambers, in which a
robot is provided aside from a center of the transfer chamber, a buffer
is provided to be driven without interference of the robot, and a aligner
is provided to adjust a position of a substrate mounted on the buffer. In
order to achieve the aforementioned objects, there is provided a transfer
chamber for a flat display device manufacturing apparatus, wherein a
robot is provided aside from a center of the transfer chamber. In
addition, in order to drive the robot, a sealing member is provided to
seal a hole formed at a predetermined portion of the transfer chamber,
and an aligner for adjusting the substrate in the transfer chamber and a
buffer where the substrate is mounted on are provided.
