A vertical electrostatic actuator is based on a layered structure consisting
of
two conducting or semiconducting layers separated by an insulating layer and/or
layered structure consisting of p-type and n-type layers separated by a pn-junction.
The number of conducting layers, p-type layers and/or n-type layers can be more
than two as long as each two adjacent layers are separated by an insulating layer
or a pn-junction. The mobile electrode of the actuator can be formed along a flexure
in a micro-mechanical system. Two stationary electrodes are located on either side
of the mobile electrode. The layered structure of the electrodes increases the
torque on the flexure and thus improves the performance of the actuator. Fabrication
methods for the electrostatic actuator and micro-mechanical systems employing the
same are disclosed.
