A cooling device for cooling an object to be processed to a target temperature
comprises a plurality of contact members mounted on a placing table, for supporting
the object such that the object opposes a top surface of the placing table with
an interval, temperature sensors for outputting temperature information of the
object supported by the contact members, a first cooling unit for cooling the placing
table to a temperature lower than the target temperature to cool the object, a
second cooling unit for heating the object cooled by the first cooling unit to
a temperature almost equal to the target temperature, and a contrast circuit for
performing a switching operation between cooling by the first cooling unit and
heating by the second cooling unit on the basis of the temperature information
from the temperature sensors.
