An inspection method which simplifies an inspection step by eliminating the need
to set probes on wiring or probe terminals, and an inspection device for performing
the inspection step. A voltage is applied to each of inspected circuits or circuit
elements to operate the same. Signal processing is performed on an output from
each inspected circuit or circuit element during operation to form a signal (operation
information signal) including information on the operating condition of the circuit
or the circuit element. The operation information signal is amplified and the amplitude
of an alternating current voltage separately input is modulated with the amplified
operation information signal. The voltage of the modulated alternating current
is read in a non-contact manner to determine whether the corresponding circuit
or circuit element is non-defective or defective.
