An integrated mesopump-sensor suitable for disposition in two- and three-dimensional
arrays having small dimensions is disclosed. One mesopump is formed of an electrostatically
attractable flexible diaphragm disposed through cavities or pumping chambers formed
between two opposing electrostatically chargeable material layers. Fluid is pumped
through the chambers by sequentially moving the diaphragm toward the first chargeable
layer, then towards the second chargeable layer, which can pull and push the fluid
through a series of chambers, and past the sensor. One group of sensors utilizes
multiple and varied chemoresistive sensors which can vary in resistance differently
in response to the presence of various analytes. Another group of sensors utilizes
chemo-fluorescent sensors that fluoresce in the presence of particular analytes.
Some mesopump-sensor systems can be manufactured using MEMS technology and can
be coupled to controllers for sequencing the pumps and analyzing sensor outputs
using methods including Principle Component Analysis.
