A variable optical attenuator has a first movable waveguide support and a second
waveguide support that include first and second waveguides, respectively, such
that the first and second waveguides are aligned for propagating an optical energy.
An electrically driven actuator positions the movable waveguide support for coupled,
optical misalignment relative to the second support to achieve a desired optical
attenuation value. The movable waveguide support may be in a cantilevered configuration
in which a distal end extends over a surface having an electrode. In this example,
applying a drive signal to the electrode deflects the movable support such that
the signal coupled between the first waveguide to the second waveguide is attenuated.
The drive signal may be set to achieve a desired value for an electrical parameter
that varies with the position of the movable waveguide support. In some examples,
the drive signal is set to achieve a desired capacitance or voltage difference
between the movable waveguide support and the electrode.
