A method of producing a microlens array includes a patterning step of forming
a
first optical resin layer having a first refractive index on a transparent substrate
and forming a plurality of microlens planes arrayed in a two-dimensional pattern
on the front surface of the first optical resin layer; a planarizing step of forming
a planarized second optical resin layer; a joining step of providing a support
layer on which a transparent protective film is previously formed; and a removing
step of removing the support layer in such a manner that only the protective film
remains on the second optical resin layer. The planarizing step is performed by
filling irregularities of the microlens planes with a resin having a second refractive
index and planarizing the front surface, opposed to the microlens planes, of the
resin, to form the planarized second optical resin layer, and the joining step
is performed by joining the support layer to the planarized second optical resin
layer. With this method, a microlens array excellent in surface accuracy and flatness
can be produced without the need of provision of a support layer made from glass.
