Light emitting devices formed in an array on a first substrate are transferred
to an insulating material, to form a sheet-shaped device substrate. The sheet-shaped
device substrate is cut along an array direction of the light emitting devices
into long-sized line-shaped device substrates. The line-shaped device substrates
are arrayed on a second substrate such that the line-shaped device substrates are
enlargedly spaced from each other. The line-shaped device substrates divided from
the second substrate are arrayed on a third substrate such as to be enlargedly
spaced from each other.