To reduce cost of defect redundancy and trimming in a semiconductor integrated
circuit having multiple layer wirings and copper wirings, an address for salvaging
a defect of a memory cell array in a semiconductor is stored by using a nonvolatile
memory element constituting a floating electrode by a first layer of polysilicon,
or the nonvolatile memory element is programmed in testing the semiconductor integrated
circuit. As a result, a special process is not needed in forming the nonvolatile
memory element. In other words, the nonvolatile memory element can be formed in
a process of forming a CMOS device and an apparatus of a laser beam for programming
is not needed since the programming is carried out in testing. Thus, the time necessary
for programming can be shortened, and, therefore, testing costs can be reduced.
