In an exposure apparatus of the invention, for a spatial light modulator, each
of a plurality of pixel portions fewer than the total number of the pixel portions
is controlled with a control signal generated according to exposure information.
Namely, a part of the pixel portions is controlled without controlling a whole
of the pixel portions on the substrate. Thus, the number of pixels in the pixel
portions is decreased, and transfer time of the control signal becomes short. This
enables modulation speed of the laser beam to be increased and the high-speed exposure
to be performed. An incorporated laser light source, in which the laser beams are
incorporated and struck on the optical fiber, is preferable to the laser device.
By adopting the incorporated laser light source, high brightness and high output
can be obtained, and it is preferable to the exposure of the spatial light modulator.
Since the fiber array is obtained with few optical fibers, it is low cost. Since
the number of optical fibers is few, the light-emitting region is further decreased
when the optical fibers are arrayed.
