Nanostructure sensing devices for detecting an analyte are described.
The devices include nanostructures connected to conductive elements, all on a substrate.
Contact regions adjacent to points of contact between the nanostructures and the
conductive elements are given special treatment. The proportion of nanostructure
surface area within contact regions can be maximized to effect sensing at very
low analyte concentrations. The contact regions can be passivated in an effort
to prevent interaction between the environment and the contact regions for sensing
at higher analyte concentrations and for reducing cross-sensing. Both contact regions
and at least some portion of the nanostructures can be covered with a material
that is at least partially permeable to the analyte of interest and impermeable
to some other species to tune selectivity and sensitivity of the nanostructure
sensing device.