A method and apparatus providing a micro-mirror device configured to increase
a
switching frequency thereof. The micro-mirror device includes a substrate with
at least one address electrode positioned over the substrate to provide an electrostatic
force and includes at least one support member positioned over the substrate and
extending upward above the substrate. The micro-mirror device also includes a mirror
and a spring member. The mirror is disposed over the at least one address electrode
and coupled to the at least one support member. The mirror is configured to deflect
toward the substrate in response to the at least one address electrode applying
the electrostatic force to the mirror. The spring member is spaced apart between
the substrate and the mirror and coupled to the at least one support member. The
spring member is operable to deflect separately from the mirror and toward the substrate.
