A method for purifying tungsten hexafluoride of high purity, capable of producing
tungsten hexafluoride of higher purity than that of the related art, readily and
at a low cost. A method for purifying tungsten hexafluoride of high purity, characterized
in that tungsten hexafluoride containing molybdenum hexafluoride as an impurity,
makes contact with a layer, in which a metal or an alloy is packed, containing
at least one of molybdenum, tungsten, copper, nickel, iron, cobalt, zinc, titanium,
aluminum, calcium, and magnesium at a temperature ranging from 0 C. to 100 C.
